Some time ago I tried to debayer my Sony NEX-5 / 14MP sensor, let me share my experiences with you:
It was quite hard to remove the cover glass. The only thing that helped here was to crack it by shocking it thermally und then removing the shivers manually.
I fixed the bonding wires with UHU endfest, a 2 component glue, to protect them.
The tool I used to scratch was a simple wooden toothpick
Attached you can see the sensor at work in progress:
and the "First Light" of the debayered sensor. Unfortunately I touched some parts of the circuitry, so the left part is nearly dark with extremely low responsivity. On the outer right side there's still some CFA left, you can still see some colors in the pillow:
At the moment I'm stuck with the procedure, so I've decided to stop here and save my money for a ASI 1600 mono :-)
CS,
Andreas